Blending of nanoscale and microscale in uniform large-area sculptured thin-film architectures

被引:52
作者
Horn, MW [1 ]
Pickett, MD [1 ]
Messier, R [1 ]
Lakhtakia, A [1 ]
机构
[1] Penn State Univ, Dept Engn Sci & Mech, University Pk, PA 16802 USA
关键词
D O I
10.1088/0957-4484/15/3/013
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The combination of large thickness (>3 mum), large-area uniformity (75 mm diameter), and high growth rate (up to 0.4 mum min(-1)) in assemblies of complex-shaped nanowires on lithographically defined patterns has been achieved for the first time. The nanoscale and the microscale have thus been blended together in sculptured thin films with transverse architectures. SiOx (x approximate to 2) nanowires were grown by electron-beam evaporation onto silicon substrates both with and without photoresist lines (1D arrays) and checkerboard (2D arrays) patterns. Atomic self-shadowing due to oblique-angle deposition enables the nanowires to grow continuously, to change direction abruptly, and to maintain a constant cross-sectional diameter. The selective growth of nanowire assemblies on the top surfaces of both 1D and 2D arrays can be understood and predicted using simple,geometrical shadowing equations.
引用
收藏
页码:303 / 310
页数:8
相关论文
共 22 条
[1]   Gradient nanostructures for interfacing microfluidics and nanofluidics [J].
Cao, H ;
Tegenfeldt, JO ;
Austin, RH ;
Chou, SY .
APPLIED PHYSICS LETTERS, 2002, 81 (16) :3058-3060
[2]  
Chen H C., 1983, Theory of Electromagnetic Waves
[3]   Controlled growth of periodic pillars by glancing angle deposition [J].
Dick, B ;
Brett, MJ ;
Smy, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (01) :23-28
[4]  
Hodgkinson I, 2001, ADV MATER, V13, P889, DOI 10.1002/1521-4095(200107)13:12/13<889::AID-ADMA889>3.0.CO
[5]  
2-K
[6]  
HODGKINSON IJ, 1998, BIREFRINGENT THIN FI
[7]   Fabrication of tetragonal square spiral photonic crystals [J].
Kennedy, SR ;
Brett, MJ ;
Toader, O ;
John, S .
NANO LETTERS, 2002, 2 (01) :59-62
[8]  
KONIG H, 1950, OPTIK, V6, P111
[9]  
Kundt A., 1886, ANN PHYS CHEM, V263, P59, DOI DOI 10.1002/ANDP.18862630103
[10]   Sculptured thin films: accomplishments and emerging uses [J].
Lakhtakia, A .
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2002, 19 (1-2) :427-434