Measurement and modeling of solvent removal for spin coating

被引：14

作者：

Gu, J ^{[1
]}

Bullwinkel, MD ^{[1
]}

Campbell, GA ^{[1
]}

机构：

[1] CLARKSON UNIV, DEPT CHEM ENGN, POLYMER FABRICAT & PROPERTIES LAB, POTSDAM, NY 13699 USA

来源：

POLYMER ENGINEERING AND SCIENCE | 1996年 / 36卷 / 07期

关键词：

D O I：

10.1002/pen.10489

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

Solvent concentration is an important factor for spin-coated film planarization. Two techniques, one an on-line optical method and the other an off-line gel permeation chromatography method, have been used to investigate the coating concentration change during spinning. The experimental observations are compared with the spin-coating model predictions. The modeled concentration and thickness are in close agreement with experiment. Under certain conditions, the spin-coating model can be significantly simplified. These conditions are discussed.

引用

页码：1019 / 1026

页数：8

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