Crystallographic texture in cubic boron nitride thin films

被引:55
作者
Medlin, DL [1 ]
Friedmann, TA [1 ]
Mirkarimi, PB [1 ]
Cardinale, GF [1 ]
McCarty, KF [1 ]
机构
[1] UNIV CALIF DAVIS,DEPT CHEM ENGN & MAT SCI,DAVIS,CA 95616
关键词
D O I
10.1063/1.361381
中图分类号
O59 [应用物理学];
学科分类号
摘要
We examine the crystallographic texture exhibited by cubic boron;nitride (cBN) in thin films grown by ion-assisted deposition. Our analysis indicates that the cBN is preferentially oriented such that individual crystallites have at least one [111] direction lying in the plane of the film but are otherwise randomly oriented about (1) the substrate normal and (2) the in-plane cBN [111] axis. This preferential orientation is consistent with an alignment between the cBN {111} planes and the basal planes of the layer of highly oriented graphitic boron nitride:that forms in the initial stages of film growth.
引用
收藏
页码:3567 / 3571
页数:5
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