STRUCTURAL CHARACTERIZATION OF PREFERENTIALLY ORIENTED CUBIC BN FILMS GROWN ON SI (001) SUBSTRATES

被引：35

作者：

BALLAL, AK ^{[1
]}

SALAMANCARIBA, L ^{[1
]}

TAYLOR, CA ^{[1
]}

DOLL, GL ^{[1
]}

机构：

[1] GM CORP,DEPT PHYS,RES LABS,WARREN,MI 48090

来源：

THIN SOLID FILMS | 1993年 / 224卷 / 01期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/0040-6090(93)90456-Y

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin cubic boron nitride films have been deposited on (001) faces of silicon substrates using ion-assisted pulsed laser deposition. Infrared transmittance spectra of the films showed strong absorption at 1080 cm-1, indicating sp3 bonding of cubic symmetry of the deposited film. Cross-sectional and plan-view transmission electron microscopy showed the structure of the films to be cubic zinc-blende with a lattice constant of 0.362 nm. The films were found to be adherent and preferentially oriented with the cubic BN [110] axis parallel to the Si [001] direction.

引用

页码：46 / 51

页数：6

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