PREPARATION, PROPERTIES AND APPLICATIONS OF BORON-NITRIDE THIN-FILMS

被引：243

作者：

ARYA, SPS

DAMICO, A

机构：

[1] CNR,IST ELETTR STATO SOLIDO,I-00156 ROME,ITALY

[2] UNIV AQUILA,DIPARTIMENTO INGN ELETTR,I-67100 AQUILA,ITALY

来源：

THIN SOLID FILMS | 1988年 / 157卷 / 02期

关键词：

D O I：

10.1016/0040-6090(88)90008-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：267 / 282

页数：16

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