Time-resolved study of SrTiO3 homoepitaxial pulsed-laser deposition using surface x-ray diffraction

被引:46
作者
Eres, G
Tischler, JZ
Yoon, M
Larson, BC
Rouleau, CM
Lowndes, DH
Zschack, P
机构
[1] Oak Ridge Natl Lab, Div Solid State, Oak Ridge, TN 37831 USA
[2] Univ Illinois, Mat Res Lab, Urbana, IL 61801 USA
关键词
D O I
10.1063/1.1477279
中图分类号
O59 [应用物理学];
学科分类号
摘要
Homoepitaxy of SrTiO3 by pulsed-laser deposition has been studied using in situ time-resolved surface x-ray diffraction in the temperature range of 310 degreesC to 780 degreesC. Using a two-detector configuration, surface x-ray diffraction intensities were monitored simultaneously at the (0 0 (1)/(2)) specular and the (0 1 (1)/(2)) off-specular truncation rod positions. Abrupt intensity changes in both the specular and off-specular rods after laser pulses indicated prompt crystallization into SrTiO3 layers followed by slower intra- and interlayer surface rearrangements on time scales of seconds. Specular rod intensity oscillations indicated layer-by-layer growth, while off-specular rod intensity measurements suggested the presence of transient in-plane lattice distortions for depositions above 600 degreesC. (C) 2002 American Institute of Physics.
引用
收藏
页码:3379 / 3381
页数:3
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