Automatic alignment of a Kirkpatrick-Baez active optic by use of a soft-x-ray Hartmann wavefront sensor

被引:32
作者
Mercère, P
Idir, M
Moreno, T
Cauchon, G
Dovillaire, G
Levecq, X
Couvet, L
Bucourt, S
Zeitoun, P
机构
[1] Synchrotron SOLEIL, F-91192 Gif Sur Yvette, France
[2] Imagine Opt, F-91400 Orsay, France
[3] Ecole Polytech, ENSTA, CNRS, Lab Opt Appliquee, F-91761 Palaiseau, France
关键词
D O I
10.1364/OL.31.000199
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present what we believe to be the first automatic alignment of a synchrotron beamline by the Hartmann technique. Experiments were performed, in the soft-x-ray range (E = 3 keV, lambda = 0.414 nm), by using a four-actuator Kirkpatrick-Baez (YB) active optic. A system imaging the KB focal spot and a soft-x-ray Hartmann wavefront sensor were used alternatively to control the KB optic. The beam corrected with the help of the imaging system was used to calibrate the wavefront sensor. With both closed loops, we focused the beam into a 6.8 mu m X 9 mu m FWHM focal spot. (c) 2006 Optical Society of America.
引用
收藏
页码:199 / 201
页数:3
相关论文
共 9 条
[1]  
HIGNETTE O, 1997, P SOC PHOTO-OPT INS, V3152, P21
[2]  
HIGNETTE O, 2001, P SOC PHOTO-OPT INS, V4499, P19
[3]  
JANOUSCH M, 2002, PSI SCI REPORT 2002, V7
[4]  
LEVECQ X, 2001, Patent No. 0109435
[5]   Hartmann wave-front measurement at 13.4 nm with λEUV/120 accuracy [J].
Mercère, P ;
Zeitoun, P ;
Idir, M ;
Le Pape, S ;
Douillet, D ;
Levecq, X ;
Dovillaire, G ;
Bucourt, S ;
Goldberg, KA ;
Naulleau, PP ;
Rekawa, S .
OPTICS LETTERS, 2003, 28 (17) :1534-1536
[6]  
MERCERE P, 2005, THESIS U P M CURIE P
[7]   An in situ scanning-slit alignment system for Kirkpatrick-Baez optics [J].
Naulleau, PP ;
Batson, P ;
Denham, P ;
Richardson, D ;
Underwood, J .
OPTICS COMMUNICATIONS, 2002, 212 (4-6) :225-233
[8]   Some new schemes for producing high-accuracy elliptical x-ray mirrors by elastic bending [J].
Padmore, HA ;
Howells, MR ;
Irick, S ;
Renner, T ;
Sandler, R ;
Koo, YM .
OPTICS FOR HIGH-BRIGHTNESS SYNCHROTRON RADIATION BEAMLINES II, 1996, 2856 :145-156
[9]  
PRESS WH, 1989, NUMERICAL RECIPIES