Pulsed laser deposition of permanent magnetic Nd2Fe14B thin films

被引:26
作者
Geurtsen, AJM
Kools, JCS
deWit, L
Lodder, JC
机构
[1] PHILIPS RES LABS,5656 AA EINDHOVEN,NETHERLANDS
[2] UNIV TWENTE,MESA RES INST,INFORAMT STORAGE & TECHNOL GRP,7500 AE ENSCHEDE,NETHERLANDS
关键词
D O I
10.1016/0169-4332(95)00541-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Pulsed Laser Deposition (PLD) is applied to deposit thin (thickness typically 100 nm) films of Nd2Fe14B. It is shown that films can be grown which have the desired composition and phase, Nd2Fe14B grows with the c-axis along the film normal on [110] Al2O3 single crystal substrates covered with a Ta layer. These films are found to have a strong magnetic anisotropy along this axis.
引用
收藏
页码:887 / 890
页数:4
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