Hot carrier reliability of N-LDMOS transistor arrays for power BiCMOS applications

被引:34
作者
Brisbin, D [1 ]
Strachan, A [1 ]
Chaparala, P [1 ]
机构
[1] Natl Semicond Corp, Santa Clara, CA 95052 USA
来源
40TH ANNUAL PROCEEDINGS: INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM | 2002年
关键词
D O I
10.1109/RELPHY.2002.996617
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper evaluates the hot carrier performance of n-channel lateral DMOS (N-LDMOS) transistors. The N-LDMOS has been the common choice for the driver transistor in high voltage (20-30 V) smart power applications. These high drain voltages potentially make N-LDMOS hot carrier degradation an important reliability concern. This paper focuses on the hot carrier test methodology and Geometry effects in N-LDMOS transistor arrays. This paper differs from previous work in that it describes for the first time the HC performance of N-LDMOS transistor arrays rather than discrete devices and discusses an N-LDMOS failure mode not yet addressed in the literature.
引用
收藏
页码:105 / 110
页数:6
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