Convolution of spectra in optical microprobe experiments

被引:24
作者
Atkinson, A [1 ]
Jain, SC
Webb, SJ
机构
[1] Univ London Imperial Coll Sci Technol & Med, Dept Mat, London SW7 2BP, England
[2] IMEC, B-3001 Louvain, Belgium
[3] Univ London Imperial Coll Sci Technol & Med, Dept Phys, London SW7 2BP, England
关键词
D O I
10.1088/0268-1242/14/6/312
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
When optical microprobe spectroscopies, based on Raman or luminescence, are used to study materials properties (such as composition or strain) that vary within the volume of material excited by the microprobe, it is necessary to convolute the material property variation with the response function of the microprobe to obtain the observable spectrum. A method for this convolution, in the general case in which the material shows significant absorption of the incident light, is suggested and is shown to give acceptable interpretation of test experiments on alumina and silicon single crystals.
引用
收藏
页码:561 / 564
页数:4
相关论文
共 14 条
[11]   STRESS MEASUREMENT IN SINGLE-CRYSTAL AND POLYCRYSTALLINE CERAMICS USING THEIR OPTICAL FLUORESCENCE [J].
MA, Q ;
CLARKE, DR .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1993, 76 (06) :1433-1440
[12]   STRAINED-LAYER HETEROSTRUCTURES, AND THEIR APPLICATIONS TO MODFETS, HBTS, AND LASERS [J].
MORKOC, H ;
SVERDLOV, B ;
GAO, GB .
PROCEEDINGS OF THE IEEE, 1993, 81 (04) :493-556
[13]   A method to interpret micro-Raman experiments made to measure nonuniform stresses: Application to local oxidation of silicon structures [J].
Pinardi, K ;
Jain, SC ;
Willander, M ;
Atkinson, A ;
Maes, HE ;
Van Overstraeten, R .
JOURNAL OF APPLIED PHYSICS, 1998, 84 (05) :2507-2512
[14]  
Pinardi K, 1998, MATER RES SOC SYMP P, V505, P507