Effects of focused ion beam milling on the compressive behavior of directionally solidified micropillars and the nanoindentation response of an electropolished surface

被引：190

作者：

Shim, S. ^{[3
]}

Bei, H. ^{[1
]}

Miller, M. K. ^{[1
]}

Pharr, G. M. ^{[1
,2
]}

George, E. P. ^{[1
,2
]}

机构：

[1] Oak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37831 USA

[2] Univ Tennessee, Dept Mat Sci & Engn, Knoxville, TN 37996 USA

[3] Res Inst Ind Sci & Technol, Offshore & Machinery Res Dept, Gyunggi 445813, South Korea

来源：

ACTA MATERIALIA | 2009年 / 57卷 / 02期

关键词：

Nanoindentation; Compression test; Yield phenomena; Plastic deformation; Focused ion beam (FIB) damage; POLYCRYSTALLINE MICRO STRUCTURES; MECHANICAL-PROPERTIES; SPECIMEN PREPARATION; AUTOMATED-ANALYSIS; SIZE DEPENDENCE; PLASTICITY; STRENGTH; SCALE; DEFORMATION; SIMULATION;

D O I：

10.1016/j.actamat.2008.09.033

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Focused ion beam (FIB) milling is the typical method Used to fabricate micropillars to Study small-scale plasticity and size effects in uniaxial compression. However, FIB milling can introduce defects into the milled pillars. To investigate the effects of FIB damage on mechanical behavior, we tested Mo-alloy micropillars that were FIB milled following directional solidification, and compared their compressive response to pillars that were not FIB milled. We also FIB milled at glancing incidence a Mo-alloy single-crystal surface, and compared its nanoindentation response to an electropolished surface of the same crystal. Implications for the interpretation of data obtained from FIB-milled micropillars are discussed. (C) 2008 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

引用

页码：503 / 510

页数：8

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