Microlens formation by thin-film deposition with mesh-shaped masks

被引：25

作者：

Grunwald, R

Mischke, H

Rehak, W

机构：

[1] Max Born Inst Nichtlineare Opt & Kurzzeitspektros, D-12489 Berlin, Germany

[2] Adolf Slaby Inst GmbH, D-12489 Berlin, Germany

来源：

APPLIED OPTICS | 1999年 / 38卷 / 19期

关键词：

D O I：

10.1364/AO.38.004117

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Thin-film microlens arrays with high fill factors have been fabricated in a one-step process by shading a vapor beam in a vacuum-deposition apparatus with metallic meshes placed at defined distances to the substrate surface. To generate three-dimensional mask structures with the necessary depth profiles, microgalvanic technology has been applied. Profiles and optical properties of the microlenses have been studied theoretically and experimentally. (C) 1999 Optical Society of America.

引用

页码：4117 / 4124

页数：8

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