Focused ion beam tuning of in-plane vibrating micromechanical resonators

被引：21

作者：

Syms, RRA

Moore, DF

机构：

[1] Univ London Imperial Coll Sci Technol & Med, Dept Elect & Elect Engn, London SW7 2BT, England

[2] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

来源：

ELECTRONICS LETTERS | 1999年 / 35卷 / 15期

关键词：

D O I：

10.1049/el:19990855

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Strategies for permanently tuning the resonant frequency of inplane micromechanical resonators are compared. It is shown that tuning of the suspension stiffness may have advantages compared with tuning of the mass. Iterative frequency tuning of laterally resonant electrostatic comb-drive microactuators by focused ion beam machining is demonstrated.

引用

页码：1277 / 1278

页数：2

共 6 条

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[2]

Cabuz C., 1994, Proceedings IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems (Cat. No.94CH3404-1), P245, DOI 10.1109/MEMSYS.1994.555760

[3] Focused ion beams in microsystem fabrication [J].