Metallo-organic decomposition: A chemical approach to thin film deposition.

被引：16

作者：

Alves, OL

Ronconi, CM

Galembeck, A

机构：

[1] Univ Estadual Campinas, Inst Quim, BR-13083970 Campinas, SP, Brazil

[2] Univ Fed Pernambuco, CCEN, Dept Quim Fundamental, BR-50740540 Recife, PE, Brazil

来源：

QUIMICA NOVA | 2002年 / 25卷 / 01期

关键词：

thin films; metatlo-organic decomposition; MOD;

D O I：

10.1590/S0100-40422002000100013

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

This review focus the more relevant foundations and applications of the Metallo-Organic Decomposition (MOD) technique, mainly within the last decade. The technique has grown significantly, mainly due to the good results concerning the preparation of multicomponent oxide systems with composition, structural and morphologic control, in a relatively simple way. This opened new opportunities to obtain materials with well-defined electrical and optical properties.

引用

收藏

页码：69 / 77

页数：9

相关论文

共 84 条

[1] Thin films of bismuth vanadates with modifiable conduction properties [J].

Barreca, D ;

Depero, LE ;

Di Noto, V ;

Rizzi, GA ;

Sangaletti, L ;

Tondello, E .

CHEMISTRY OF MATERIALS, 1999, 11 (02) :255-261

[2] MICROSTRUCTURAL EVOLUTION AND EPITAXIAL ALIGNMENT OF THIN-FILMS OF LITHIUM-NIOBATE DEPOSITED ONTO SAPPHIRE BY METALLOORGANIC DECOMPOSITION [J].

BRAUNSTEIN, G ;

PAZPUJALT, GR ;

BLANTON, TN .

THIN SOLID FILMS, 1995, 264 (01) :4-10

[3] FUNDAMENTALS OF SOL-GEL DIP COATING [J].

BRINKER, CJ ;

FRYE, GC ;

HURD, AJ ;

ASHLEY, CS .

THIN SOLID FILMS, 1991, 201 (01) :97-108

[4] PREPARATION OF BARIUM STRONTIUM-TITANATE THIN-FILM CAPACITORS ON SILICON BY METALLORGANIC DECOMPOSITION [J].

CATALAN, AB ;

MANTESE, JV ;

MICHELI, AL ;

SCHUBRING, NW ;

POISSON, RJ .

JOURNAL OF APPLIED PHYSICS, 1994, 76 (04) :2541-2543

[5] NEXAFS investigations of transition metal oxides, nitrides, carbides, sulfides and other interstitial compounds [J].

Chen, JG .

SURFACE SCIENCE REPORTS, 1997, 30 (1-3) :1-152

[6]

CHEN KC, 1990, MATER RES SOC SYMP P, V169, P1213

[7]

CHEN KC, Patent No. 5072035

[8] A view of tendences and perspectives in electrochromism: Searching for new materials and more simple designs. [J].

de Oliveira, SC ;

Torresi, RM ;

de Torresi, SIC .

QUIMICA NOVA, 2000, 23 (01) :79-87

[9] The preparation and characterization of electrode materials for solid state batteries [J].

Ehrlich, GM ;

Schleich, DM .

SENSORS AND ACTUATORS A-PHYSICAL, 1995, 51 (01) :17-19

[10] PREPARATION OF YBCO SUPERCONDUCTOR THIN-FILM BY SPIN-COATING METHOD WITH METAL-ORGANIC PRECURSORS [J].

FANG, SC ;

HUANG, CH ;

CHEN, IC ;

LIAW, CF ;

HURNG, WM .

JOURNAL OF MATERIALS SCIENCE, 1994, 29 (01) :99-102

← 1 2 3 4 5 6 7 8 9 →