Femtosecond laser ablation of frozen acetone for deposition of diamond-like carbon films

被引：33

作者：

Okoshi, M ^{[1
]}

Higuchi, S ^{[1
]}

Hanabusa, M ^{[1
]}

机构：

[1] Toyohashi Univ Technol, Dept Elect & Elect Engn, Tenpa Ku, Toyohashi, Aichi 4418580, Japan

来源：

JOURNAL OF APPLIED PHYSICS | 1999年 / 86卷 / 03期

关键词：

D O I：

10.1063/1.370962

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

790 nm, 130 fs ultrashort laser pulses generated by a Ti: sapphire laser system were used to ablate frozen acetone and deposit diamond-like carbon (DLC) films on Si substrate. The film was identified as DLC by Raman spectra. The sp(3) bonding fraction in the film was estimated to be 41% from an electron energy loss spectroscopy measurement. Black, conductive films were deposited from frozen acetylene target. Frozen methanol did not produce any deposit. Optical emission was measured to compare the plumes generated by different targets. (C) 1999 American Institute of Physics. [S0021-8979(99)08315-2].

引用

页码：1768 / 1770

页数：3

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