DEPOSITION OF DIAMOND-LIKE CARBON-FILMS BY EXCIMER LASERS USING FROZEN ACETYLENE

被引：7

作者：

HANABUSA, M

TSUJIHARA, K

机构：

[1] Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Tenpaku

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 1995年 / 1卷 / 03期

关键词：

D O I：

10.1109/2944.473669

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Diamond-like carbon (DLC) films were deposited by laser ablation with the target made of Frozen acetylene, instead of conventional graphite. An ArF laser and a KrF laser were used to dissociate frozen acetylene and to deposit DLC films on quartz substrates below 300 degrees C. The C-H bond was more abundant in the films deposited by the KrF laser. It was possible to deposit particle-free films in contrast to laser ablation of graphite targets. Experimental results suggested the importance of energetic and charged species ejected from frozen acetylene.

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页码：848 / 851

页数：4

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