LASER PLASMA DIAMOND

被引：52

作者：

DAVANLOO, F

JUENGERMAN, EM

JANDER, DR

LEE, TJ

COLLINS, CB

机构：

[1] Center for Quantum Electronics, University of Texas at Dallas, Texas 75083-0688, P.O. Box 830688, Richardson

来源：

JOURNAL OF MATERIALS RESEARCH | 1990年 / 5卷 / 11期

关键词：

D O I：

10.1557/JMR.1990.2398

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like films containing no hydrogen can be deposited from laser plasmas that are highly ionized. Growth rates of 0.5 μm/h over 100 cm2 areas have been realized on untreated substrates of a variety of materials including Si, Ge, ZnS, glass, and plastics. Measurements of optical properties and mass densities support the identification of this laser plasma diamond as a conglomerate of very fine grains of diamond polytypes in a matrix of other carbon forms. © 1990, Materials Research Society. All rights reserved.

引用

页码：2398 / 2404

页数：7

共 23 条

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