LASER PLASMA DIAMOND

被引:52
作者
DAVANLOO, F
JUENGERMAN, EM
JANDER, DR
LEE, TJ
COLLINS, CB
机构
[1] Center for Quantum Electronics, University of Texas at Dallas, Texas 75083-0688, P.O. Box 830688, Richardson
关键词
D O I
10.1557/JMR.1990.2398
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond-like films containing no hydrogen can be deposited from laser plasmas that are highly ionized. Growth rates of 0.5 μm/h over 100 cm2 areas have been realized on untreated substrates of a variety of materials including Si, Ge, ZnS, glass, and plastics. Measurements of optical properties and mass densities support the identification of this laser plasma diamond as a conglomerate of very fine grains of diamond polytypes in a matrix of other carbon forms. © 1990, Materials Research Society. All rights reserved.
引用
收藏
页码:2398 / 2404
页数:7
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