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Micromachined twin gas sensor for CO and O2 quantification based on catalytically modified nano-SnO2

被引：133
作者：
Belmonte, JC
Manzano, J
Arbiol, J
Cirera, A
Puigcorbé, J
Vilà, A
Sabaté, N
Gràcia, I
Cané, C
Morante, JR
机构：
[1] Univ Barcelona, Fac Phys, Dept Elect, E-08028 Barcelona, Spain
[2] Linkoping Univ, Inst Phys & Measurement Technol, Div Appl Phys, S-58183 Linkoping, Sweden
[3] CSIC, CNM, Natl Ctr Microelect, Dept Silicon Technol & Microsyst, E-08193 Barcelona, Spain
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2006年 / 114卷 / 02期
关键词：
SnO2; Pd; CO; O-2; micromachined; gas sensor;
D O I：
10.1016/j.snb.2005.08.007
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
In this work we present a micromachined twin sensor that can distinguish between carbon monoxide (CO) and O-2 gas taking advantage of the high sensitivity of SnO2 to these gases. The SnO2 nanoparticles of both sensors are catalytically modified with different Pd loadings that act as active filters. In this way, one sensor response is turned to present a higher sensitivity to CO than to O-2, whereas the other sensor is mainly turned for detecting O-2 variations. The twin sensor has two membranes in the same die of micromachined silicon. Each membrane works independently from the other without any cross talk of temperature. The resistance data obtained from this twin sensor as a function of CO and O-2 concentrations is parametrized. Then, two functions are calculated for the quantification of CO/O-2 gas mixtures. A comparison with commercial gas sensors is shown. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：881 / 892
页数：12
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