Energetic cluster impact (ECI): A new method for thin-film formation

被引：58

作者：

Haberland, H

Moseler, M

Qiang, Y

Rattunde, O

Reiners, T

Thurner, Y

机构：

[1] Freiburger Materialforschungszentrum, 79104 Freiburg

来源：

SURFACE REVIEW AND LETTERS | 1996年 / 3卷 / 01期

关键词：

D O I：

10.1142/S0218625X96001595

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A completely ionized beam of metal clusters is deposited with variable kinetic energy on a substrate. Mirror-like and strongly adhering films having unusual properties are produced for sufficiently high cluster impact energies. Numerical simulations provide the physical insight why this novel technique gives different, and sometimes superior results compared to conventional methods. Several examples are presented.

引用

页码：887 / 890

页数：4

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