Microlens fabrication by the modified LIGA process

被引：16

作者：

Lee, SK ^{[1
]}

Lee, KC ^{[1
]}

Lee, SS ^{[1
]}

机构：

[1] Pohang Univ Sci & Technol, Dept Mech Engn, Pohang 790784, Kyongbuk, South Korea

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984323

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A microlens or microlenses array has been fabricated by a novel fabrication technology which is based upon a deep X-ray exposure and a thermal treatment of a resist, usually PMMA. The fabrication technology is very simple and produces the microlenses array as well as the microlens which has good surface roughness less than 1 nm. Molecular weight and glass transition temperature of PMMA is reduced when it is exposed to the deep X-ray. The microlens is produced through the effect of surface tension and reflow by applying the thermal treatment on the irradiated PMMA. A configuration of the microlens is determined by parameters such as absorbed X-ray dose on PMMA, heating temperature, and heating time in the thermal treatment. Diameters of the produced microlens range from 30 mum to 1500 mum and their heights vary between 10 mum and 25 mum.

引用

页码：520 / 523

页数：4

共 6 条

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