Out-of-plane refractive microlens fabricated by surface micromachining

被引：64

作者：

King, CR

Lin, LY

Wu, MC

机构：

[1] University of California-Los Angeles, Electrical Engineering Department, Los Angeles, CA 90095-1594

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1996年 / 8卷 / 10期

关键词：

D O I：

10.1109/68.536651

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel refractive microlens standing perpendicular to the substrate has been fabricated for the first time with surface-micromachining techniques. The microlens has a focal length of 670 mu m and a diameter of 300 mu m. The optical axis of the microlens is precisely defined by photolithography and can be pre-aligned to other surface-micromachined micro-optical elements integrated on the same substrate. The focusing and collimating abilities of the lens are successfully demonstrated. The refractive microlens offers higher efficiency compared with diffractive lenses, and is very useful for high-performance free-space micro-optical bench applications.

引用

页码：1349 / 1351

页数：3

共 11 条

[1]

Jay T. R., 1993, Proceedings of the SPIE - The International Society for Optical Engineering, V1751, P236

[2] 3-DIMENSIONAL MICRO-FRESNEL OPTICAL-ELEMENTS FABRICATED BY MICROMACHINING TECHNIQUE [J].