MICRO-MACHINED 3-DIMENSIONAL MICROOPTICS FOR INTEGRATED FREE-SPACE OPTICAL-SYSTEM

Novel, integrable three-dimensional micro-optical elements have been realized by surface micromachining technology, Rotatable mirrors, lenses and beam-splitters standing perpendicular to the substrate are demonstrated, The optical elements are precisely hold at 90 degrees angle to the substrate by side latches, The Si substrate serves as a ''micro-optical bench'' on which monolithic micro-optical systems consisting of movable and static micro-mirrors, lenses and other components are constructed, The optical system is pre-aligned by photolithography. This technology offers a new approach to free-space integrated optics and low-cost optical packaging.