Shock wave and material vapour plume propagation during excimer laser ablation of aluminium samples

被引:76
作者
Jeong, SH
Greif, R
Russo, RE
机构
[1] Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA
[2] Kwangju Inst Sci & Technol, Mechatron Dept, Kwangju, South Korea
[3] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
关键词
D O I
10.1088/0022-3727/32/19/316
中图分类号
O59 [应用物理学];
学科分类号
摘要
A probe beam deflection technique was utilized to measure the propagation of a shock wave and material vapour plume generated during excimer laser ablation of aluminium samples. The measured transit time of the laser-induced shock wave was compared with the prediction based on an ideal blast-wave model, using the Sedov-Taylor solution. The prediction of the incident laser energy converted into the laser-induced gasdynamic flow utilizing this blast-wave model overestimated the efficiency, even under conditions when the measured shock-wave velocity follows the correct model relation. The propagation of material vapour was measured from the deflection of the probe beam at later times. The propagation velocity of material vapour ranged from 20-40 m s(-1) with a greater velocity near the target surface.
引用
收藏
页码:2578 / 2585
页数:8
相关论文
共 34 条
[1]  
ALCOCK JA, 1968, IEEE J QUANTUM ELECT, V4, P593
[2]  
ALCOCK JA, 1966, P 7 INT C PHEN ION G, V3, P224
[3]   GAS-DYNAMICS AND FILM PROFILES IN PULSED-LASER DEPOSITION OF MATERIALS [J].
ANISIMOV, SI ;
BAUERLE, D ;
LUKYANCHUK, BS .
PHYSICAL REVIEW B, 1993, 48 (16) :12076-12081
[4]  
Azzeer AM, 1996, APPL PHYS B-LASERS O, V63, P307
[5]   DYNAMICS OF LASER-INDUCED PLUME EXPANSION INTO AN AMBIENT GAS DURING FILM DEPOSITION [J].
BULGAKOV, AV ;
BULGAKOVA, NM .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1995, 28 (08) :1710-1718
[6]   TIME-RESOLVED OBSERVATION OF GAS-DYNAMIC DISCONTINUITIES ARISING DURING EXCIMER-LASER ABLATION AND THEIR INTERPRETATION [J].
CALLIES, G ;
BERGER, P ;
HUGEL, H .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1995, 28 (04) :794-806
[7]   ACCELERATED EXPANSION OF LASER-ABLATED MATERIALS NEAR A SOLID-SURFACE [J].
CHEN, KR ;
LEBOEUF, JN ;
WOOD, RF ;
GEOHEGAN, DB ;
DONATO, JM ;
LIU, CL ;
PURETZKY, AA .
PHYSICAL REVIEW LETTERS, 1995, 75 (25) :4706-4709
[8]   A STUDY OF ENERGY-CONVERSION DURING ND-YAG LASER-ABLATION OF METAL-SURFACES IN AIR BY MEANS OF A LASER-BEAM DEFLECTION PROBE [J].
DIACI, J ;
MOZINA, J .
JOURNAL DE PHYSIQUE IV, 1994, 4 (C7) :737-740
[9]   BLAST-WAVE STUDIES OF EXCIMER-LASER ABLATION OF ZNS [J].
DYER, PE ;
KEY, PH ;
SANDS, D ;
SNELLING, HV ;
WAGNER, FX .
APPLIED SURFACE SCIENCE, 1995, 86 (1-4) :18-23
[10]   ON THE GAS KINETICS OF LASER-INDUCED EVAPORATION OF METALS [J].
FINKE, BR ;
SIMON, G .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1990, 23 (01) :67-74