Optical knife-edge technique for nanomechanical displacement detection

被引：53

作者：

Karabacak, D.

Kouh, T.

Huang, C. C.

Ekinci, K. L. ^{[1
]}

机构：

[1] Boston Univ, Dept Aerosp & Mech Engn, Boston, MA 02215 USA

[2] Boston Univ, Dept Elect & Comp Engn, Boston, MA 02215 USA

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 19期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.2203513

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We describe an optical knife-edge technique for nanomechanical displacement detection. Here, one carefully focuses a laser spot on a moving edge and monitors the reflected power as the edge is displaced sideways. To demonstrate nanomechanical displacement detection using the knife-edge technique, we have measured in-plane resonances of nanometer scale doubly clamped beams. The obtained displacement sensitivity is in the similar to 1 pm root Hz range-in close agreement with a simple analytical model. (c) 2006 American Institute of Physics.

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页数：3

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