[1] Tsinghua Univ, Dept Engn Mech, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Ctr Nano & Micro Mech, Beijing 100084, Peoples R China
[3] Monash Univ, Dept Mech & Aerosp Engn, Clayton, Vic 3800, Australia
[4] Tsinghua Univ, Dept Engn Phys, Beijing 100084, Peoples R China
[5] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China
[6] Nanchang Univ, Inst Adv Study, Nanchang, Peoples R China