Detection of particles of less than 5 nm in diameter formed in an argon-silane capacitively coupled radio-frequency discharge

被引：99

作者：

Boufendi, L ^{[1
]}

Gaudin, J ^{[1
]}

Huet, S ^{[1
]}

Viera, G ^{[1
]}

Dudemaine, M ^{[1
]}

机构：

[1] ESPEO, GREMI, F-45067 Orleans 2, France

来源：

APPLIED PHYSICS LETTERS | 2001年 / 79卷 / 26期

关键词：

D O I：

10.1063/1.1425431

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A method for the detection of dust particles occurring in silane-argon gas mixture plasmas is presented. It is based on the spectral analysis of the radio-frequency current. The amplitudes of the fundamental (13.56 MHz) and second harmonics (40.68 MHz) are very sensitive to the presence of the earlier nanoparticles when their size is in the range of 2-3 nm even if their influence on the capacitive character of the impedance is negligible. This method is nonperturbative, with a temporal resolution in the microsecond range, very easy to implement, and can thus be used for industrial reactors. (C) 2001 American Institute of Physics.

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页码：4301 / 4303

页数：3

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