Alternative approach to electroless Cu metallization of AlN by a nonaqueous polyol process

被引：34

作者：

Chow, GM

Kurihara, LK

Ma, D

Feng, CR

Schoen, PE

MartinezMiranda, LJ

机构：

[1] USN,RES LAB,LAB MOL INTERFACIAL INTERACT,WASHINGTON,DC 20375

[2] USN,RES LAB,DIV ELECT SCI & TECHNOL,WASHINGTON,DC 20375

[3] UNIV MARYLAND,DEPT MAT & NUCL ENGN,COLLEGE PK,MD 20742

来源：

APPLIED PHYSICS LETTERS | 1997年 / 70卷 / 17期

关键词：

D O I：

10.1063/1.118847

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Cu metallization of AIN substrates was performed using a nonaqueous, electroless; alcohol based approach known as the polyol method. The concentration of Cu2O in the film depended on the orientation of the substrates during deposition. This approach is very attractive for metallizing electronic substrates which are susceptible to hydrolytic degradation. (C) 1997 American Institute of Physics.

引用

页码：2315 / 2317

页数：3

共 12 条

[1] CHANCHANI R, 1988, P 38 ECC C MAT RES, P84
[2] MORPHOLOGY AND ADHESION STRENGTH IN ELECTROLESS CU METALLIZED ALN SUBSTRATE
CHANG, JH
DUH, JG
CHIOU, BS
[J]. IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1993, 16 (08): : 1012 - 1020
[3] CHIOU BS, 1993, PLAT SURF FINISH, V80, P65
[4] STRUCTURAL, MORPHOLOGICAL, AND MAGNETIC STUDY OF NANOCRYSTALLINE COBALT-COPPER POWDERS SYNTHESIZED BY THE POLYOL PROCESS
CHOW, GM
KURIHARA, LK
KEMNER, KM
SCHOEN, PE
ELAM, WT
ERVIN, A
KELLER, S
ZHANG, YD
BUDNICK, J
AMBROSE, T
[J]. JOURNAL OF MATERIALS RESEARCH, 1995, 10 (06) : 1546 - 1554
[5] CHOW GM, 1836, Patent No. 76572
[6] CHOW GM, 1836, Patent No. 77467
[7] CONTROLLED NUCLEATION AND GROWTH OF MICROMETER-SIZE COPPER PARTICLES PREPARED BY THE POLYOL PROCESS
FIEVET, F
FIEVETVINCENT, F
LAGIER, JP
DUMONT, B
FIGLARZ, M
[J]. JOURNAL OF MATERIALS CHEMISTRY, 1993, 3 (06) : 627 - 632
[8] FIEVET F, 1989, MAT RES B, V29
[9] THICK-FILM AND DIRECT BOND COPPER FORMING TECHNOLOGIES FOR ALUMINUM NITRIDE SUBSTRATE
IWASE, N
ANZAI, K
SHINOZAKI, K
HIRAO, O
THANH, TD
SUGIURA, Y
[J]. IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1985, 8 (02): : 253 - 258
[10] NANOCRYSTALLINE METALLIC POWDERS AND FILMS PRODUCED BY THE POLYOL METHOD
KURIHARA, LK
CHOW, GM
SCHOEN, PE
[J]. NANOSTRUCTURED MATERIALS, 1995, 5 (06): : 607 - 613

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