Fabrication and characteristics of double-fused vertical-cavity lasers

被引:4
作者
Babic, DI [1 ]
Streubel, K [1 ]
Mirin, RP [1 ]
Margalit, NM [1 ]
Peters, MG [1 ]
Bowers, JE [1 ]
Hu, EL [1 ]
机构
[1] ROYAL INST TECHNOL,DEPT ELECTR,S-10044 STOCKHOLM,SWEDEN
关键词
D O I
10.1007/BF00943615
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We discuss the fabrication process and characteristics of three consecutive runs of double-fused 1.5-mu m vertical-cavity lasers. We have measured light-current characteristics of over three hundred lasers with ten different diameters between 6 and 60 mu m and observe a yield of over 95%. The process and design improvements resulted in a low pulsed threshold current of 3 mA on a number of 6- and 8-mu m-diameter devices and threshold current density of 2 kA cm(-2) on 60-mu m-diameter devices at room temperature.
引用
收藏
页码:475 / 485
页数:11
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