Analysis of particulates generated in a radiofrequency methane plasma by laser light scattering and optical spectroscopy

被引：19

作者：

Géraud-Grenier, I ^{[1
]}

Massereau-Guilbaud, V ^{[1
]}

Plain, A ^{[1
]}

机构：

[1] Univ Orleans, LASEP, Fac Sci, F-18028 Bourges, France

来源：

EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS | 1999年 / 8卷 / 01期

关键词：

D O I：

10.1051/epjap:1999229

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The generation and the behavior of amorphous hydrogenated carbon particulates have been investigated in a pure methane low pressure radiofrequency discharge at 13.56 MBz. In the plasma, the formation and the presence of two kinds of particulates have been evidenced by use of laser light scattering. The study of the different forces acting on the particulates allowed us to understand their behavior in the discharge. Optical emission measurements have enabled us to correlate the evolutions of the emission lines (CH, H-alpha and H-2) with the growth of amorphous hydrogenated carbon particulates and also with the results obtained by laser light scattering. The particulate sizes have been measured and a particulate number density of about 3.0 x 10(6) cm(-3) has been determined.

引用

页码：53 / 59

页数：7

共 29 条

[1] ELECTRON HOLOGRAPHY REVEALS THE INTERNAL STRUCTURE OF PALLADIUM NANO-PARTICLES [J].

ALLARD, LF ;

VOELKL, E ;

KALAKKAD, DS ;

DATYE, AK .

JOURNAL OF MATERIALS SCIENCE, 1994, 29 (21) :5612-5614

[2] NUMERICAL AND EXPERIMENTAL DIAGNOSTICS OF RF DISCHARGES IN PURE AND DUSTY ARGON [J].

BELENGUER, P ;

BLONDEAU, JP ;

BOUFENDI, L ;

TOOGOOD, M ;

PLAIN, A ;

BOUCHOULE, A ;

LAURE, C ;

BOEUF, JP .

PHYSICAL REVIEW A, 1992, 46 (12) :7923-7933

[3] CHARACTERISTICS OF A DUSTY NONTHERMAL PLASMA FROM A PARTICLE-IN-CELL MONTE-CARLO SIMULATION [J].

BOEUF, JP .

PHYSICAL REVIEW A, 1992, 46 (12) :7910-7922

[4]

Bohren C F., 1998, Absorption and Scattering of Light by Small Particles

[5] PARTICLE GENERATION AND BEHAVIOR IN A SILANE-ARGON LOW-PRESSURE DISCHARGE UNDER CONTINUOUS OR PULSED RADIOFREQUENCY EXCITATION [J].

BOUCHOULE, A ;

PLAIN, A ;

BOUFENDI, L ;

BLONDEAU, JP ;

LAURE, C .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (04) :1991-2000

[6] PARTICLE PARTICLE INTERACTIONS IN DUSTY PLASMAS [J].

BOUFENDI, L ;

BOUCHOULE, A ;

PORTEOUS, RK ;

BLONDEAU, JP ;

PLAIN, A ;

LAURE, C .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (05) :2160-2162

[7] Characterization of C:H:N deposition from CH4/N-2 rf plasmas using optical emission spectroscopy [J].

Clay, KJ ;

Speakman, SP ;

Amaratunga, GAJ ;

Silva, SRP .

JOURNAL OF APPLIED PHYSICS, 1996, 79 (09) :7227-7233

[8] SPATIOTEMPORAL POWDER FORMATION AND TRAPPING IN RADIO-FREQUENCY SILANE PLASMAS USING 2-DIMENSIONAL POLARIZATION-SENSITIVE LASER SCATTERING [J].

DORIER, JL ;

HOLLENSTEIN, C ;

HOWLING, AA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03) :918-926

[9] ANALYSIS OF SPHERICAL CARBON PARTICLE GROWTH IN METHANE PLASMA BY MIE-SCATTERING ELLIPSOMETRY [J].

HAYASHI, Y ;

TACHIBANA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (7B) :4208-4211

[10] PARTICULATES IN ALUMINUM SPUTTERING DISCHARGES [J].

JELLUM, GM ;

GRAVES, DB .

JOURNAL OF APPLIED PHYSICS, 1990, 67 (10) :6490-6496

← 1 2 3 →