PARTICLE PARTICLE INTERACTIONS IN DUSTY PLASMAS

被引:93
作者
BOUFENDI, L
BOUCHOULE, A
PORTEOUS, RK
BLONDEAU, JP
PLAIN, A
LAURE, C
机构
[1] UNIV ORLEANS, UFR SCI,RECH ENERGET MILIEUX IONISES GRP,CNRS, URA 831,BP 6759, F-45067 ORLEANS 02, FRANCE
[2] AUSTRALIAN NATL UNIV, RES SCH PHYS SCI & ENGN, PLASMA RES LAB, CANBERRA, ACT 2601, AUSTRALIA
关键词
D O I
10.1063/1.353117
中图分类号
O59 [应用物理学];
学科分类号
摘要
High densities Of submicron particles have been created in an Ar/SiH4 parallel plate radio-frequency (rf) discharge. The particles were collected and measured by electron microscopy and the mean particle diameter was found to be 230 +/- 60 nm. Laser scattering from the dense clouds of such particles showed that the concentration was 1 X 10(8) cm-3. A laser Doppler anemometer was used to measure the particle velocity distribution and hence the mean particle mass. This is consistent with the specific density of the hydrogenated amorphous silicon. The mean velocities of particles were measured at two different gas flows when the discharge was extinguished, so that the particles are neutral and do not interact, and the particles move with the gas velocity. However, during the discharge the particles have almost no mean axial velocity, even though the gas flow is as large as before. This is due to the strong interparticle interactions that keep the particle cloud, as a whole, stationary. The charge on the particles is estimated, leading to a value of the Coulomb coupling parameter of GAMMA = 10. This large value suggests that the particle cloud can be viewed as a Coulomb liquid.
引用
收藏
页码:2160 / 2162
页数:3
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