Enhancement of field emission from cathodes with superthin diamond-like carbon films

被引:28
作者
Litovchenko, VG [1 ]
Evtukh, AA [1 ]
Marchenko, RI [1 ]
Klyui, NI [1 ]
Semenovich, VA [1 ]
机构
[1] NATL ACAD SCI UKRAINE,INST SUPERHARD MAT,UA-254074 KIEV,UKRAINE
关键词
field emission; diamond-like carbon film;
D O I
10.1016/S0169-4332(96)00727-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this work, the fact of rather stable enhanced field emission from Si-tip covered by diamond-like carbon (DLC) films is demonstrated. Effect of different types of coatings and surface treatments (electrochemical etching, H+-implantation, Cs-enriched layers and DLC films) on the electron field emission (FE) from silicon tips have been examined. The emission characteristics of FE such as the emission area of tip alpha, factor of electric field enhancement beta, coefficient of quality of field emitter gamma, work function, etc. have been calculated. The most remarkable enhancement of FE have been observed for Si-cathodes covered by DLC films. The mechanism of the effect observed is discussed.
引用
收藏
页码:213 / 217
页数:5
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