Imaging point defects using a transmission electron microscope with controllable spherical aberration

被引:2
作者
Anstis, GR [1 ]
机构
[1] Univ Technol Sydney, Dept Appl Phys, Broadway, NSW 2007, Australia
来源
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 2001年 / 81卷 / 11期
关键词
D O I
10.1080/13642810110079934
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Computer simulations are utilized to show how to use a transmission electron microscope which has an objective lens with an adjustable coefficient of spherical aberration to determine the three spatial coordinates of a single heavy atom embedded in a crystal. This information can be obtained by forming an image with only those electrons that have been scattered through a large angle by the crystal. By using a high-angle annular dark-field aperture the atoms can be considered as independent scatterers, in contrast with imaging with low-angle coherent scattering. In addition, by reducing the aberration coefficients of the lens, the effective outer radius of the aperture can be made large, thereby leading to a small depth of focus. Calculations show that this form of imaging produces detectable contrast with currently available aberration correctors, sources and detectors.
引用
收藏
页码:1687 / 1699
页数:13
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