共 17 条
[12]
SHINODA T, 1991, SID 91, P724
[13]
UCHIIKE H, 1998, ASIA DISPL 98, P195
[15]
2-DIMENSIONAL MODELING OF HIGH PLASMA-DENSITY INDUCTIVELY-COUPLED SOURCES FOR MATERIALS PROCESSING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1994, 12 (01)
:461-477
[16]
WHANG KW, 1997, IDW 97 19 23 NOV NAG, P531
[17]
Yoshikawa K., 1992, JAP DISPL 92, P605