Metallic thin-film thermocouple for thermoelectric microgenerators

被引：21

作者：

Castano, E

Revuelto, E

Martin, MC

GarciaAlonso, A

Gracia, FJ

机构：

[1] Microelectronics Department, Ctro. Estud. Invest. Tec. G., E-20009 San Sebastián

[2] Microelectronics Department, Ctro. de Estud. e Invest. Tec., San Sebastian

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 60卷 / 1-3期

关键词：

thermoelectric microgenerators; thin-film thermocouples;

D O I：

10.1016/S0924-4247(96)01435-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new metallic thin-film thermocouple orientated towards thermoelectric microgenerators has been developed. It consists of a 3 mu m thick NiCr/SiO2/Sb multilayer structure sputter deposited onto a thermally oxidized silicon substrate. A relative Seebeck coefficient of alpha(ab) = 76 mu V K-1 and an optimal figure of merit of z(ab) = 0.08 x 10(-3) K-1 have been measured for this material combination. Both parameters are very close to the theoretical values.

引用

页码：65 / 67

页数：3

共 6 条

[1]

BALTES H, 1990, SENSORS, V7, P13

[2] MODEL OF THERMOELECTRIC RADIATION SENSORS MADE BY CMOS AND MICROMACHINING [J].