OPTIMIZATION TOOL FOR THE PERFORMANCE PARAMETERS OF THERMOELECTRIC MICROSENSORS

被引：27

作者：

VOLKLEIN, F

BALTES, H

机构：

[1] ETH Hoenggerberg, Zurich, Switzerland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1993年 / 36卷 / 01期

关键词：

THERMOELECTRIC MICROSENSORS; ANALYTICAL OPTIMIZATION; MODELING;

D O I：

10.1016/0924-4247(93)80142-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A one-dimensional analytical optimization for thin-film thermoelectric microsensors is presented. The results provide a tool for the optimization of thermal resistance, sensitivity and detectivity as a function of geometrical dimensions for given material parameters. Curves are given that allow the performance parameters to be predicted for a variety of geometrical and material parameters.

引用

页码：65 / 71

页数：7

共 20 条

[1]

BALTES H, 1991, 10TH SENS S, P17

[2]

BALTES H, 1991, MICROMECHANICAL SENS, V32, P61

[3]

BERLICKI T, 1991, SENSOR ACTUAT A-PHYS, V25, P629

[4] MODEL OF THERMOELECTRIC RADIATION SENSORS MADE BY CMOS AND MICROMACHINING [J].