A BATCH-FABRICATED SILICON THERMOPHILE INFRARED DETECTOR

被引:70
作者
LAHIJI, GR [1 ]
WISE, KD [1 ]
机构
[1] UNIV MICHIGAN,DEPT ELECT & COMP ENGN,ELECTRON PHYS LAB,ANN ARBOR,MI 48109
关键词
D O I
10.1109/T-ED.1982.20652
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:14 / 22
页数:9
相关论文
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