Hot filament for in situ catalyst supply in the chemical vapor deposition growth of carbon nanotubes

被引:6
作者
Chen, CF [1 ]
Lin, CL [1 ]
Wang, CM [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30049, Taiwan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2002年 / 41卷 / 1AB期
关键词
carbon nanotubes; hot filament chemical vapor deposition; pyrolysis; catalyst;
D O I
10.1143/JJAP.41.L67
中图分类号
O59 [应用物理学];
学科分类号
摘要
A simplified chemical vapor deposition (CVD) method is described for in situ synthesis of multiwalled carbon nanotubes. The synthesis apparatus is similar to, that used to deposit CVD diamond. However, an Fe-Cr wire is selected and coiled as the filament to grow nanotubes. The tubes crow because the filament acts as both a heat source for pyrolysis, and a source of metal for the catalyst. The evaporated metal atoms can be considered to catalyze the growth of carbon nanotubes. The system has the potential to inexpensively synthesize large amounts of nanotubes continuously by combining physical and chemical vapor deposition.
引用
收藏
页码:L67 / L69
页数:3
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