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High-resolution tunnel junction extreme ultraviolet detectors limited by quasiparticle counting statistics

被引：26
作者：
Friedrich, S
le Grand, JB
Hiller, LJ
Kipp, J
Frank, M
Labov, SE
Cramer, SP
Barfknecht, AT
机构：
[1] Univ Calif Lawrence Livermore Natl Lab, Livermore, CA 94550 USA
[2] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA
[3] Conductus Inc, Sunnyvale, CA 94086 USA
来源：
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1999年 / 9卷 / 02期
基金：
美国国家航空航天局; 美国国家卫生研究院;
关键词：
D O I：
10.1109/77.783742
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Superconducting tunnel junctions (STJs) can be used as high-resolution high-count rate photon detectors. They are based on the measurement of the excess quasiparticle tunneling current caused by the absorption of a photon in one of the junction electrodes, We have fabricated Nb-Al-AlOx-Al-Nb tunnel junction detectors with different sizes and characterized them in sychrotron experiments. We present a study of the detector performance in the energy band between 50 and 1000 eV, For photon energies below 70 eV, the intrinsic device resolution of the best STJ devices agrees with the theoretical limit set by the statistics of the charge generation and tunneling processes.
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页码：3330 / 3333
页数：4
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