Parallel assembly of high aspect ratio microstructures

被引：6

作者：

Feddema, JT ^{[1
]}

Christenson, TR ^{[1
]}

机构：

[1] Sandia Natl Labs, Albuquerque, NM 87185 USA

来源：

MICROROBOTICS AND MICROASSEMBLY | 1999年 / 3834卷

关键词：

D O I：

10.1117/12.357819

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, a prototype robotic workcell for the parallel assembly of LIGA components is described. A Cartesian robot is used to press 386 and 485 micron diameter pins into a LIGA substrate and then place a 3-inch diameter wafer with LIGA gears onto the pins. Upward and downward looking microscopes are used to locate holes in the LIGA substrate, pins to be pressed in the holes, and gears to be placed on the pins. This vision system can locate parts within 3 microns, while the Cartesian manipulator can place the parts within 0.4 microns.

引用

页码：153 / 164

页数：12

共 16 条

[1]

BANKS D, INTRO MICROENGINEERI

[2]

CHRISTENSON TR, 1999, IEEE MEMS 99

[3] Planning and control of a microassembly process in a flexible microrobot-based desktop station [J].