Fabrication of three-dimensional structures by three-photon polymerization

被引：51

作者：

Farsari, M ^{[1
]}

Filippidis, G ^{[1
]}

Fotakis, C ^{[1
]}

机构：

[1] Fdn Res & Technol Hellas, Inst Elect Struct & Laser, Iraklion 71110, Crete, Greece

来源：

OPTICS LETTERS | 2005年 / 30卷 / 23期

关键词：

D O I：

10.1364/OL.30.003180

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Received June 7, 2005; revised manuscript received July 11, 2005: accepted July 30, 2005 We report the fabrication of three-dimensional structures of submicrometer resolution by three-photon polymerization. This resolution has been achieved by polymerizing ORMOCER, a UV photocurable organic-inorganic hybrid material, with an ultrafast laser irradiation at 1028 nm. To our knowledge, this is the first demonstration of three-photon polymerization, a process that may allow the fabrication of components of very high resolution. (c) 2005 Optical Society of America.

引用

页码：3180 / 3182

页数：3

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