Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics

被引:530
作者
Serbin, J
Egbert, A
Ostendorf, A
Chichkov, BN
Houbertz, R
Domann, G
Schulz, J
Cronauer, C
Fröhlich, L
Popall, M
机构
[1] Laser Zentrum Hannover EV, D-30419 Hannover, Germany
[2] Fraunhofer Inst Silicatforsch, D-97082 Wurzburg, Germany
关键词
D O I
10.1364/OL.28.000301
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Investigations of two-photon polymerization of inorganic-organic hybrid materials initiated by femtosecond Ti:sapphire laser pulses are performed. First applications of this technique for the fabrication of three-dimensional microstructures and photonic crystals in inorganic-organic hybrid polymers with a structure size down to 200 nm and a periodicity of 450 nm are discussed. (C) 2003 Optical Society of America.
引用
收藏
页码:301 / 303
页数:3
相关论文
共 17 条
[1]  
Born M., 1999, Principles of Optics, V7th, P484
[2]  
BUESTRICH R, 2000, MAT RES SOC S P, V629
[3]   Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication [J].
Cumpston, BH ;
Ananthavel, SP ;
Barlow, S ;
Dyer, DL ;
Ehrlich, JE ;
Erskine, LL ;
Heikal, AA ;
Kuebler, SM ;
Lee, IYS ;
McCord-Maughon, D ;
Qin, JQ ;
Röckel, H ;
Rumi, M ;
Wu, XL ;
Marder, SR ;
Perry, JW .
NATURE, 1999, 398 (6722) :51-54
[4]   Complex micromachines produced and driven by light [J].
Galajda, P ;
Ormos, P .
APPLIED PHYSICS LETTERS, 2001, 78 (02) :249-251
[5]  
Inoue Shinya, 1995, P1
[6]   Finer features for functional microdevices - Micromachines can be created with higher resolution using two-photon absorption. [J].
Kawata, S ;
Sun, HB ;
Tanaka, T ;
Takada, K .
NATURE, 2001, 412 (6848) :697-698
[7]  
Kuebler S. M., 2001, Journal of Photopolymer Science and Technology, V14, P657, DOI 10.2494/photopolymer.14.657
[8]   Three-dimensional microfabrication with two-photon-absorbed photopolymerization [J].
Maruo, S ;
Nakamura, O ;
Kawata, S .
OPTICS LETTERS, 1997, 22 (02) :132-134
[9]   Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication [J].
Maruo, S ;
Kawata, S .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (04) :411-415
[10]  
Popall M, 2000, MOL CRYST LIQ CRYST, V354, P711