Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication

被引：176

作者：

Maruo, S ^{[1
]}

Kawata, S ^{[1
]}

机构：

[1] Osaka Univ, Dept Appl Phys, Suita, Osaka 565, Japan

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1998年 / 7卷 / 04期

关键词：

photopolymer; three-dimensional microfabrication; two-photon absorption;

D O I：

10.1109/84.735349

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present three-dimensional (3-D) microstructures fabricated from photopolymerizable resin with a resolution of 0.62 mu m. The method used to fabricate such small structures has Been developed using a femto-second-pulsed near-infrared (IR) laser. Structures such as microcoils and microtubes are presented which demonstrate the effectiveness of our method. In this method, a two-photon absorption process is successfully utilized to confine the solidification of photopolymerizable resin to the focused spot of the laser, which is possible due to the quadratic dependence of the two-photon absorption rate on light intensity. The experimental system, experimental conditions, and related issues for this novel method of photopolymerization are also discussed. [285].

引用

页码：411 / 415

页数：5

共 15 条

[1] 2-PHOTON LASER SCANNING FLUORESCENCE MICROSCOPY [J].