Correlation between plasma expansion dynamics and gold-thin film structure during pulsed-laser deposition

被引：48

作者：

Irissou, E ^{[1
]}

Le Drogoff, B ^{[1
]}

Chaker, M ^{[1
]}

Guay, D ^{[1
]}

机构：

[1] INRS Energie & Mat, Varennes, PQ J3X 1S2, Canada

来源：

APPLIED PHYSICS LETTERS | 2002年 / 80卷 / 10期

关键词：

D O I：

10.1063/1.1458534

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Pulsed-laser deposition of Au thin films has been achieved by ablating a gold target with a KrF excimer Laser in various conditions of ambient Ar gas pressure (from 10(-5) to 4 Torr) and target-to-substrate distance (from 1.0 to 11 cm). The dynamics of the plasma plume were measured in the same conditions. Highly oriented Au (111) thin films are obtained for pressure-distance deposition conditions such that the neutral Au species have a typical velocity larger than 2 km s(-1), while a polycrystalline powder is obtained when the typical velocity is smaller than 0.8 km s(-1). (C) 2002 American Institute of Physics.

引用

页码：1716 / 1718

页数：3

共 9 条

[1]

Chrisey D. B., 1994, PULSED LASER DEPOSIT

[2] DETERMINATION OF RADIATIVE LIFETIMES OF EXCITED-STATES IN NEUTRAL GOLD USING TIME-RESOLVED VACUUM-ULTRAVIOLET LASER SPECTROSCOPY [J].