Models for electron and hole mobilities in MOS accumulation layers

We present new physically based effective mobility models for both electrons and holes in MOS accumulation layers. These models take into account carrier-carrier scattering, in addition to surface roughness scattering, phonon and fixed interface charge scattering, and screened Coulomb scattering. The newly developed effective mobility models show excellent agreement with experimental data over the range 1 x 10(16)-4 x 10(17) cm(-3) for which experimental data are available. Local-field dependent mobility models have also been developed for both electrons and holes, and they have been implemented in the two-dimensional (2-D) device simulators, PISCES and MINIMOS, thus providing for more accurate prediction of the terminal characteristics in deep submicron CMOS devices. In addition, transition region mobility models have been developed to account for the transition in the mobility in going from the accumulation layer in the gate-to-source overlap region to the inversion layer region in the channel.