Optical and electrical characterization of nitrogen ion implanted ZnSSe/p-GaAs (100)

被引：5

作者：

Hong, H ^{[1
]}

Anderson, WA ^{[1
]}

Haetty, J ^{[1
]}

Petrou, A ^{[1
]}

Lee, EH ^{[1
]}

Chang, HC ^{[1
]}

Na, MH ^{[1
]}

Luo, H ^{[1
]}

Peck, J ^{[1
]}

Mountziaris, TJ ^{[1
]}

机构：

[1] SUNY BUFFALO,DEPT ELECT & COMP ENGN,AMHERST,NY 14260

来源：

JOURNAL OF APPLIED PHYSICS | 1997年 / 82卷 / 10期

关键词：

D O I：

10.1063/1.366368

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Nitrogen ions were implanted into ZnSxSe1-x epilayers grown on p-GaAs (100) substrates by molecular beam epitaxy (MBE) and metalorganic chemical vapor deposition (MOCVD). Dopant activation and annealing out the implant damage were achieved by a postannealing process in a N-2 ambient. Schottky structures employing the implanted p-type ZnSxSe1-x were fabricated and device efficacy was examined by photoluminescence (PL) spectroscopy, current-voltage (I-V), current-voltage temperature (I-V-T), and high frequency capacitance-voltage (C-V) measurements. PL spectra showed a clear donor-acceptor pair (DAP) recombination at an energy of 2.735 and 2.72 eV, in both MBE and MOCVD ZnSSe epilayers, respectively, regardless of the postannealing temperatures. The diode conduction in forward bias proceeds by the combination of thermionic and tunneling emission. C-V measurement proved the maximum doping concentration to be around 10(17) cm(-3) after ion implantation. (C) 1997 American Institute of Physics.

引用

页码：4994 / 4999

页数：6

共 17 条

[1] SELF-COMPENSATION IN NITROGEN-DOPED ZNSE [J].