On the crystallization kinetics of solutions deposited PZT thin films

被引：25

作者：

Es-Souni, M ^{[1
]}

Piorra, A ^{[1
]}

机构：

[1] Univ Appl Sci, Inst Mat & Surface Technol, D-24149 Kiel, Germany

来源：

MATERIALS RESEARCH BULLETIN | 2001年 / 36卷 / 15期

关键词：

thin films; chemical solution deposition; electron microscopy; X-ray diffraction; microstructure; dielectric properties;

D O I：

10.1016/S0025-5408(01)00753-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The crystallization kinetics of strongly textured (100)-PZT thin films on highly textured (1 1 1)-Pt have been investigated in the temperature range from 550 to 700 degreesC. It is shown that the crystallization proceeds by the formation of globular, Zr-depleted, and Pb-rich particles that show necklace patterns. The crystallization kinetics can be described by an Avrami type analysis with a rate exponent of 1.3 and an activation energy of 141 kJ/mol. The relative dielectric constant depends strongly on the firing temperature and time, and ranges from 650 to 4000. (C) 2001 Elsevier Science Ltd. All rights reserved.

引用

页码：2563 / 2575

页数：13

共 15 条

[1] Rapid thermal processing of lead zirconate titanate thin films on Pt-GaAs substrates based on a novel 1,1,1-tris(hydroxymethyl)ethane sol-gel route [J].

Arscott, S ;

Miles, RE ;

Kennedy, JD ;

Milne, SJ .

JOURNAL OF MATERIALS RESEARCH, 1999, 14 (02) :494-499

[2] Influence of texture on the switching behavior of Pb(Zr0.70Ti0.30)O-3 sol-gel derived thin films [J].

Brooks, KG ;

Klissurska, RD ;

Moeckli, P ;

Setter, N .

JOURNAL OF MATERIALS RESEARCH, 1997, 12 (02) :531-540

[3]

Chen SY, 1998, J AM CERAM SOC, V81, P97, DOI 10.1111/j.1151-2916.1998.tb02300.x

[4]

DEY SK, 1996, FERROELECTRIC THIN F, P345

[5]

DOHERTY RD, 1983, PHYSICAL METALLURGY, V2, P988

[6]

GRISWOOD EM, 1995, FERROELCTRIC THIN FI, V4, P389

[7] Structural development in the early stages of annealing of sol-gel prepared lead zirconate titanate thin films [J].

Huang, Z ;

Zhang, Q ;

Whatmore, RW .

JOURNAL OF APPLIED PHYSICS, 1999, 86 (03) :1662-1669

[8] EFFECTS OF POROSITY ON ELECTRIC FATIGUE BEHAVIOR IN PLZT AND PZT FERROELECTRIC CERAMICS [J].

JIANG, QY ;

CROSS, LE .

JOURNAL OF MATERIALS SCIENCE, 1993, 28 (16) :4536-4543

[9] The effect of RuO2/Pt hybrid bottom electrode structure on the leakage and fatigue properties of chemical solution derived Pb(ZrxTi1-x)O3 thin films [J].

Kim, SH ;

Hong, JG ;

Streiffer, SK ;

Kingon, AI .

JOURNAL OF MATERIALS RESEARCH, 1999, 14 (03) :1018-1025

[10]

MOULSEN J, 1990, ELECTROCERAMICS, P284

← 1 2 →