Enhancement of pulsed laser removal of metal oxides by electrochemical control

被引:11
作者
Yavas, O [1 ]
Oltra, R [1 ]
Kerrec, O [1 ]
机构
[1] ELECT FRANCE,CTR RENARDIERES,F-77250 MORET SUR LOING,FRANCE
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1996年 / 63卷 / 04期
关键词
D O I
10.1007/BF01567320
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Pulsed laser irradiation of oxidized metallic surfaces in an electrolytic cell under proper voltage conditions is demonstrated to be a promising new approach for effective removal of oxide films. Systematic measurements on simulated corrosion-product films by optical reflectance profile and energy dispersive X-ray spectroscopy are used to study the physical mechanisms of this novel phenomenon, the physical conditions for its observation and its possible generality. It was observed that the utilization of a basic electrolyte solution and the imposition of a certain cathodic potential prior to laser irradiation is an essential requirement for a high removal efficiency. This new technique has potential applications in metallurgy, semiconductor fabrication technology and decontamination of nuclear power plans and is suitable for maskless patterning of oxidized surfaces.
引用
收藏
页码:321 / 326
页数:6
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