Perovskite lead titanate PLD thin films:: study of oxygen incorporation by 18O tracing technique

被引：27

作者：

Chaoui, N

Millon, E

Muller, JF

Ecker, P

Bieck, W

Migeon, HN

机构：

[1] Univ Metz, IPEM, Lab Spectrometrie Masse & Chim Laser, F-57078 Metz, France

[2] Ctr Rech Publ, Lab Anal Mat, L-1511 Luxembourg, Luxembourg

来源：

MATERIALS CHEMISTRY AND PHYSICS | 1999年 / 59卷 / 02期

关键词：

laser; deposition; ablation; isotopic tracing; perovskite; thin films;

D O I：

10.1016/S0254-0584(99)00051-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

PbTiO3 (PT) films have been deposited by pulsed laser deposition (PLD) technique on polycrystalline platinum substrate kept at a constant temperature of 550 degrees C in a 30 Pa O-18 atmosphere pressure. The fluence and the laser repetition (frequency quadrupled Nd-YAG, 266 nm) have been varied in the range 1.5-3 J cm(-2) and 2-10 Hz, respectively. The obtained films exhibit a perovskite structure and have been analyzed by dynamic secondary ion mass spectrometry (D-SIMS) in order to determine the concentration profiles of O-16 (coming from the PbTiO3 target) and O-18 (ambient gas). The effects of different parameters of the PLD process are discussed, such as the cooling step of the film in oxygen atmosphere after deposition, the laser repetition rate and the gas phase reactions. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：114 / 119

页数：6

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