Thermally activated reorientation of di-interstitial defects in silicon

被引:56
作者
Kim, J
Kirchhoff, F
Aulbur, WG
Wilkins, JW
Khan, FS
Kresse, C
机构
[1] Ohio State Univ, Dept Phys, Columbus, OH 43210 USA
[2] Ohio State Univ, Dept Elect Engn, Columbus, OH 43210 USA
[3] Vienna Univ Technol, Inst Theoret Phys, A-1040 Vienna, Austria
关键词
D O I
10.1103/PhysRevLett.83.1990
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We propose a di-interstitial model for the P6 center commonly observed in ion-implanted silicon. The di-interstitial structure and transition paths between different defect orientations can explain the thermally activated transition of the P6 center from low-temperature C-1h to room-temperature D-2d symmetry. The activation energy for the defect reorientation determined by ab initio calculations is 0.5 eV, in agreement with the experiment. Our di-interstitial model establishes a link between point defects and {311} defects, supporting the growth model by interstitial nucleations.
引用
收藏
页码:1990 / 1993
页数:4
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