MFI-type zeolite membranes were prepared by the template-free secondary growth method followed by onstream counter-diffusion or one-side chemical vapor deposition (CVD) modification to eliminate intercrystalline pores. Gas permeation and separation experiments were conducted on unmodified and modified membranes at 25-500 degrees C. For unmodified MFI-type zeolite membranes, single-gas permeation of H,, He, CO, and CO2 exhibits characteristics of Knudsen diffusion up to 500 degrees C, and adsorption of CO2, on MFI-type zeolite has a strong effect, on ternary gas separation (H-2, CO, and CO2) below 300 degrees C. Counter-diffusion CVD modification is effective in sealing the intercrystalline gaps resulting in defect-free MFI-type zeolite membranes. Permeation of nonadsorbing gases (Me, H-2, and CO) through counter-diffusion CVD-modified zeolite membranes also exhibits Knudsen diffusion characteristics with very small activation energies for diffusion (0.1-3 kJ mol(-1)), with gas permeance (diffusivity) decreasing with increasing molecular weight. For one-side CVD-modified MFI-type zeolite membranes, gas permeance (diffusivity) decreases and activation energy for diffusion increases with increasing molecular size because of the formation of an amorphous microporous silica layer. High-temperature gas permeation data on defect-free MFI-type zeolite membranes confirm the translational gas diffusion model for zeolites.